发明名称 |
METHOD AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTION |
摘要 |
<p>Systems, methods and apparatus for regulating ion energies in a plasma chamber are disclosed. An exemplary system includes an ion-energy control portion, and the ion-energy control portion provides at least one ion-energy control signal responsive to at least one ion-energy setting that is indicative of a desired distribution of energies of ions bombarding a surface of a substrate. A controller is coupled to the switch-mode power supply, and the controller provides at least two drive-control signals. In addition, a switch-mode power supply is coupled to the substrate support, the ion-energy control portion and the controller. The switch-mode power supply includes switching components configured to apply power to the substrate responsive to the drive signals and the ion-energy control signal so as to effectuate the desired distribution of the energies of ions bombarding the surface of the substrate.</p> |
申请公布号 |
EP2351070(A4) |
申请公布日期 |
2013.02.27 |
申请号 |
EP20100770205 |
申请日期 |
2010.04.27 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
HECKMAN, RANDY;BROUK, VICTOR |
分类号 |
H01L21/3065;C23C16/52;H01L21/205;H05H1/00 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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