发明名称 VAPORIZER
摘要 PURPOSE: A vaporizer is provided to improve the efficiency of evaporation by using balls for mixing fluid in a cylinder. CONSTITUTION: A cylinder(120) includes an inlet. Mixed fluid is flowed into the inlet. A first mixing cylinder part(140) includes a central fluid path and first fluid paths. The central fluid path is connected to the cylinder. A second mixing cylinder(160) includes second fluid paths.
申请公布号 KR20130019864(A) 申请公布日期 2013.02.27
申请号 KR20110082134 申请日期 2011.08.18
申请人 PARK, YOUNG KOO;POA-TECH;JEON, PYEONG GI 发明人 KIM, SANG KAP;JEON, PYEONG GI;PARK, YOUNG KOO
分类号 H01L21/205;C23C16/448 主分类号 H01L21/205
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