| 摘要 |
PURPOSE: An integrated humidity and temperature sensor module is provided to integrally sense humidity and temperature by using a single sensor module, thereby simplifying a measurement task. CONSTITUTION: An integrated humidity and temperature sensor module comprises a substrate(10), a humidity sensor(30), a sensor signal processing unit(20), a protective film, and a case. The humidity sensor is connected to a line of the substrate. The sensor signal processing unit includes a temperature sensor and is connected to the humidity sensor in a wire-bonding method by being connected to the line of the substrate. Humidity sensor signals and temperature sensor signals are input to the sensor signal processing unit. The signal processing unit performs a signal process, thereby generating humidity data and temperature data. The protective film is formed in the upper part of the sensor signal processing unit. The case is attached to the substrate to protect the sensor signal processing unit and the humidity sensor. [Reference numerals] (10) Substrate
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