发明名称 Hybrid bump capacitor
摘要 A device fabricated on a chip is disclosed. The device generally includes (A) a first pattern and a second pattern both created in an intermediate conductive layer of the chip, (B) at least one via created in an insulating layer above the intermediate conductive layer and (C) a first bump created in a top conductive layer above the insulating layer. The first pattern generally establishes a first of a plurality of plates of a first capacitor. The via may be aligned with the second pattern. The first bump may (i) be located directly above the first plate, (ii) establish a second of the plates of the first capacitor, (iii) be suitable for flip-chip bonding, (iv) connect to the second pattern through the via such that both of the plates of the first capacitor are accessible in the intermediate conductive layer. The first pattern and the second pattern may be shaped as interlocking combs.
申请公布号 US8384226(B2) 申请公布日期 2013.02.26
申请号 US20100885722 申请日期 2010.09.20
申请人 LSI CORPORATION;DONG YIKUI (JEN);HOWARD STEVEN L.;ZHONG FREEMAN Y.;LOWRIE DAVID S. 发明人 DONG YIKUI (JEN);HOWARD STEVEN L.;ZHONG FREEMAN Y.;LOWRIE DAVID S.
分类号 H01L23/48;H01L21/00;H01L27/108 主分类号 H01L23/48
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