| 发明名称 |
Structure for dual contact trench capacitor and structure thereof |
| 摘要 |
A dual contact trench capacitor and design structure for a dual contact trench capacitor is provided. The structure includes a first plate extending from a trench and isolated from a wafer body, and a second plate extending from the trench and isolated from the wafer body and the first plate.
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| 申请公布号 |
US8384140(B2) |
申请公布日期 |
2013.02.26 |
| 申请号 |
US20080181341 |
申请日期 |
2008.07.29 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;KEMERER TIMOTHY W.;LARY JENIFER E.;NAKOS JAMES S.;SHANK STEVEN M. |
发明人 |
KEMERER TIMOTHY W.;LARY JENIFER E.;NAKOS JAMES S.;SHANK STEVEN M. |
| 分类号 |
H01L27/108 |
主分类号 |
H01L27/108 |
| 代理机构 |
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代理人 |
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| 主权项 |
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