Real-time analysis system for profiling the elemental components of CIGS thin film using Laser-Induced Breakdown Spectroscopy

摘要

PURPOSE: A fabrication system of a cigs thin film solar cell with a real-time analysis apparatus for profiling the elemental components of a CIGS(Copper Indium Gallium Selenide) thin film using laser-induced breakdown spectroscopy is provided to simultaneously produce a CIGS thin film solar cell and control the quality of the CIGS thin film solar cell by identifying the anomalies of the CIGS thin film solar cell in real time and provide feedback to a CIGS manufacturing process. CONSTITUTION: A header(100) detects the spectrum of plasma generated from a CIGS(Copper Indium Gallium Selenide) thin film. The header is composed of a laser irradiation unit(11) and a spectrum detection optical unit(20). A header transport unit(200) transfers the header by connecting the header with the transfer of the CIGS thin film. The header transport unit is carried along a header transport passage(400) in a fixed platform. A spectrum analysis unit(300) analyzes spectrum information delivered from the header.