发明名称 |
FLATNESS MEASURING APPARATUS AND METHOD FOR CARRIER |
摘要 |
PURPOSE: An apparatus and method for measuring the flatness of a carrier are provided to improve the accuracy of measurement by including a sensing unit which measures the flatness of a substrate attaching surface. CONSTITUTION: A carrier(20) is loaded on a holder. A substrate is attached to the carrier. A rotating unit(200) rotates the holder. A sensing unit(300) is relatively moved on the lower side of the holder and measures the flatness of the substrate attaching surface.
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申请公布号 |
KR20130019063(A) |
申请公布日期 |
2013.02.26 |
申请号 |
KR20110080987 |
申请日期 |
2011.08.16 |
申请人 |
SFA ENGINEERING CORP. |
发明人 |
PARK, MIN HO;LEE, JAE SEUNG;KIM, JUNG HOON |
分类号 |
H01L51/56;G01B11/30 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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