| 摘要 |
The invention relates to the scan methods and means for tomographic examination of two-dimensional structure of planar objects. The invention aims at developing a method of studying nanodimensional or microscopic objects with a resolution of the order of 30 nanometer and means of implementation of such a method. The task in view is performed such that the scanning microscope comprises a radiation source 1, as well as, positioned along the radiation rays, an opaque screen 2 with a slit, an object stage 4 with a mobility device for disposing of and maneuvering with an object under examination within the scan plane 7, a radiation detector 8 connected to an information processing unit 9, wherein according to the embodiment, the opaque screen is supplied with at least one slit shutter 3 movable in the plane of the opaque screen, the slit shutter providing the variability of cross-sectional dimensions of the slit.
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