| 摘要 |
<p>PURPOSE: A film crack detecting apparatus and a film forming apparatus are provided to easily detect a crack of a film by including a determining device which determines the cleaning of a process container and an elastic wave detecting device. CONSTITUTION: An elastic wave detecting device(42) is mounted on a film forming device and detects an elastic wave. A determining device(44) performs an operation based on the elastic wave detecting device and determines whether to clean a processing container(4). An intensity filtering device outputs a signal over preset intensity as an elastic wave detection signal. [Reference numerals] (44) Determining device; (45) Display unit; (61) Intensity filter device; (70) Device control unit; (72) Memory medium; (AA) Gas; (BB) Vacuum exhaust</p> |
