发明名称 APPARATUS FOR DEPOSITING ORGANIC MATERIAL AND METHOD FOR DEPOSITING ORGANIC MATERIAL
摘要 PURPOSE: An apparatus and method for depositing organic materials are provided to reduce a organic material loss by performing a plurality of substrate depositing processes in one chamber. CONSTITUTION: A main chamber is divided into a first deposition region(22) and a second deposition region(24). A first substrate loading unit(30) loads a first substrate. A second substrate loading unit(32) loads a second substrate. An organic material deposition source is arranged in the main chamber. The organic material deposition source sprays organic particles to the surfaces of the first substrate and the second substrate.
申请公布号 KR101237507(B1) 申请公布日期 2013.02.26
申请号 KR20120085924 申请日期 2012.08.06
申请人 SUNIC SYSTEM. LTD. 发明人 CHOI, CHANG SIK;IM, YOUNG;LEE, YOUNG JONG
分类号 H01L51/56;C23C14/24 主分类号 H01L51/56
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