发明名称 |
Methodology for wordline short reduction |
摘要 |
The method of forming a wordline is provided in the present invention. The proposed method includes steps of: (a) providing a plurality of SASTIs with a plurality of first POLY cells deposited thereon; and (b) depositing a first fill-in material having a relatively high etching rate oxide-like material in the plurality of SASTIs and on each side wall of the plurality of first POLY cells.
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申请公布号 |
US8383515(B2) |
申请公布日期 |
2013.02.26 |
申请号 |
US20100947309 |
申请日期 |
2010.11.16 |
申请人 |
MACRONIX INTERNATIONAL CO., LTD.;LUOH TUUNG;YANG LING-WU;YANG TAHONE;CHEN KUANG-CHAO |
发明人 |
LUOH TUUNG;YANG LING-WU;YANG TAHONE;CHEN KUANG-CHAO |
分类号 |
H01L21/44 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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