| 摘要 |
<p>PURPOSE: A wafer processing method is provided to improve processing efficiency by maintaining one standby chamber every chamber. CONSTITUTION: It is determined whether to perform a process in a chamber(S100). The number of standby wafers is determined in a system(S300). One wafer is drawn if the standby wafer does not exist in the system(S400). The drawn wafer is transferred to the chamber to perform the process(S500). The wafer is not drawn if two or more standby wafers exist in the system. [Reference numerals] (AA) Start; (BB) Drawing out two wafers; (DD) Do not drawing the wafer; (EE) End; (S100) Determining whether to perform a process in an online chamber; (S200) Does a process proceed?; (S300,S320) Does the wafer on hold exist?; (S322) Is the wafer on hold more two?; (S400,CC) Drawing out one wafer; (S500) Transferring the wafer</p> |
