MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: An array board manufacturing method for an LCD(Liquid Crystal Display) device is provided to implement a linear tapper profile by using etchant composites. CONSTITUTION: A gate electrode is formed by using a copper metal film, a metal oxide film, and etchant composites. A source and drain electrode is formed by etching the copper metal film and metal oxide film by using the etchant composite. The etchant composite includes hydrogen peroxide, fluorine containing compound, azole compound, inorganic acid, and water.