| 摘要 |
PURPOSE: A substrate transfer unit and a substrate transfer apparatus including the same are provided to arrange a cooling unit with a diameter smaller than the thickness of a main body frame, thereby improving cooling efficiency. CONSTITUTION: A main body frame(110) comprises upper, lower, left, and right plates(111,112,113,114). The left and right plates support the upper plate. A cooling part comprises one or more cooling units among first, second, third, fourth, and fifth cooling units. A supplementary joint part is formed in the main body frame into one body. The supplementary joint part forms the diameter of the fifth cooling unit larger than the diameter of the first to fourth cooling units. |
