| 摘要 |
PURPOSE: A device for inspecting a specimen based on a laser scattering is provided to variously vary an irradiation angle of laser lights being irradiated to a specimen and to measure scattering lights being scattered by the specimen at various angles. CONSTITUTION: A device for inspecting a specimen based on a laser scattering comprises a stage(100), a moving stage(200), a specimen fixing table(300), a light source unit, and an image acquisition unit(400). The moving stage is arranged on the state and movable to all directions. The specimen fixing table is arranged on the moving stage and swivel-movable to all directions. The light source unit is arranged on the stage and irradiates laser lights to the specimen. The image acquisition unit is arranged on the stage and acquires scattering lights being scattered by the specimen. |
