发明名称 VARIABLE LIGHT DEFLECTING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a variable light deflecting apparatus. <P>SOLUTION: A variable light deflecting apparatus (100) comprises: a micro mechanical mirror system (14) having a plurality of light reflection mirror actuators (18, 20, 22, 34 and 26); and a control unit (32) that changes light deflection by controlling the mirror actuators (18, 20, 22, 24 and 26) to different reflection positions. The variable light deflecting apparatus (100) includes a back reflection mechanism (60) that is systematically adjusted according to the mirror system (14). The back reflection mechanism (60) reflects back the light reflected from a part of the mirror actuators (18, 20, 22, 24 and 26) to the back reflection mechanism (60) aiming at other parts of the mirror actuators (18, 20, 22, 24 and 26). <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013037359(A) 申请公布日期 2013.02.21
申请号 JP20120169470 申请日期 2012.07.31
申请人 LEICA MICROSYSTEMS CMS GMBH 发明人 SCHREIBER FRANK
分类号 G02B26/08;B81B7/02 主分类号 G02B26/08
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