| 摘要 |
<P>PROBLEM TO BE SOLVED: To inspect a plurality of magnetic sensors in a wafer state simultaneously and correctly. <P>SOLUTION: A magnetic sensor detection device includes: a stage 12 on which the plurality of magnetic sensors arranged in a wafer state are placed and which moves horizontally and vertically; a probe card 9 which has a probe group 13 arranged above the stage 12 while facing the stage 12 and capable of simultaneously coming into contact with magnetic sensors in an inspection region containing at least a plurality of magnetic sensors among the magnetic sensors; magnetic field generation coils 3-8 which face each other via the probe card 9 and generate magnetic fields around the probe group 13; a plurality of magnetic field environment measurement sensors 14-17 which are arranged so as to surround the outside of the probe group 13 of the probe card 9; and a magnetic field control unit which controls the output of the magnetic field generation coils 3-8 on the basis of the measurement result of the magnetic field environment measurement sensors 14-17. <P>COPYRIGHT: (C)2013,JPO&INPIT |
