| 摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture a photoelectric conversion element in which a stable-quality pn junction is formed by a cleaning process after formation of a pn junction at low cost with high productivity. <P>SOLUTION: The manufacturing method of a photoelectric conversion element includes n times (n≥2) of cleaning steps for cleaning the surface 40s of a substrate on at least a side where a pn junction is formed, after formation of the pn junction by a wet method. The cleaning steps include a water washing step for cleaning the surface with water for a predetermined time, and an electric conductance measurement step for measuring the electric conductance of water after the water washing step. The cleaning conditions are substantially identical for n times of cleaning steps, and the cleaning steps are carried out until the n-th electric conductance is reduced when compared with the (n-1)th electric conductance, and the n-th electric conductance becomes 1.0 mS/m or less. <P>COPYRIGHT: (C)2013,JPO&INPIT |
