摘要 |
<P>PROBLEM TO BE SOLVED: To mainly provide a substrate for suspension having an alignment mark having high alignment accuracy. <P>SOLUTION: The substrate for suspension is provided. In the substrate for suspension, an alignment mark without having a through hole is formed on the surface on a wiring layer side, a high reflection part having the same material as the wiring layer on the surface is formed from an outer edge part of the alignment mark toward the outside, and a low reflection part having an insulating layer or a metal support substrate on the surface is formed from the outer edge part of the alignment mark toward the inside. <P>COPYRIGHT: (C)2013,JPO&INPIT |