| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid control device capable of preventing impurities caused by reaction products from infiltrating into a chamber. <P>SOLUTION: The fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape. Fluid discharge passages 6, 7, 11, 12 having an equal length are provided in parallel with each other are provided in the outlets of the opening and closing valves 2, 3. A connection member 10 attachable to a chamber and having fluid passages 25, 26 formed in an equal length and communicating with each of the fluid discharge passages 6, 7, 11, 12, is mounted in the outlets of two fluid discharge passages 6, 7, 11, 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
