| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase productivity of a thin film solar cell of high conversion efficiency. <P>SOLUTION: A thin film solar cell 1000 in one embodiment comprises in the following order from a substrate 100: a back electrode (substrate side electrode) 110; a semiconductor layer 120 for photoelectric conversion; a low power transparent conductive film 132; and a high power transparent conductive film 134. The low power transparent conductive film is formed by sputtering with a plasma power smaller than a reference value and arranged in vicinity to the semiconductor layer. In contrast, the high power transparent conductive film is formed by sputtering with a plasma power larger than the reference value and arranged above a surface of the low power transparent conductive film. In the present invention, a manufacturing method of the above-described solar cell 1000 and a thin film solar cell of another type are provided. <P>COPYRIGHT: (C)2013,JPO&INPIT |
