LIGHT IRRADIATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To shorten a scan distance and a process time of a light irradiation process by narrowing the length of an irradiation area.

SOLUTION: A light irradiation apparatus irradiating light to a substrate 5 by using a long arc lamp 1 includes: a reflection mirror 2 having a cross-sectional shape which is an oval or parabolic shape and having a shape for condensing irradiated light onto a surface of the substrate; and a slit 4 limiting an irradiation area of the irradiated light. On a cross section perpendicular to a long axis of the long arc lamp, a main irradiation area length X and a gap H between the long arc lamp and the substrate satisfy X<0.087H.

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