Cooling arrangement for cooling of laser gas for gas laser system, has secondary cooling circuit with supplementary heat exchanger that is located for additional cooling of laser gas flowing from fan to resonator

摘要

The cooling arrangement has a primary cooling circuit that is provided with a primary cooling unit and primary heat exchanger (26). The cooling circuit is provided for cooling the laser gas passing to resonator (2) of the gas laser system (1) by fan (11). The secondary cooling circuit is provided with secondary cooling unit and secondary heat exchanger (27) so as to cool the laser gas emitted from the resonator. The supplementary heat exchanger (28) of secondary cooling circuit is located for additional cooling of laser gas flowing from the fan to the resonator. Independent claims are included for the following: (1) method for cooling of laser gas for gas laser system; and (2) gas laser system.