| 摘要 |
A purge apparatus is provided which can purge with clean gas even in the case where an in-use state is made after a long period of a non-use state. The purge apparatus includes a nozzle which is connected to a container and through which gas passes, a detection unit which detects a connection state between the container and the nozzle, and a flow rate adjustment unit which allows the gas to flow at a first flow rate when the container and the nozzle is in a connected state is detected, and allows the gas to flow at a second flow rate which is lower than the first flow rate, when the container and the nozzle are in a disconnected state is detected. |
