发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a transistor that uses an oxide semiconductor layer having electrical characteristics required in accordance with applications and to provide a semiconductor device having the transistor. <P>SOLUTION: In a transistor in which a semiconductor layer, a source electrode layer or a drain electrode layer, a gate insulating film, and a gate electrode layer are sequentially stacked on an oxide insulating film, an oxide semiconductor stacked layer, which includes at least two oxide semiconductor layers having different energy gaps from each other and has a mixed region between the stacked oxide semiconductor layers, is used as the semiconductor layer. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013038400(A) 申请公布日期 2013.02.21
申请号 JP20120151180 申请日期 2012.07.05
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H01L29/786;C23C14/08;H01L21/336;H01L21/363;H01L21/8242;H01L21/8247;H01L27/108;H01L27/115;H01L27/146;H01L29/788;H01L29/792 主分类号 H01L29/786
代理机构 代理人
主权项
地址