| 摘要 |
<P>PROBLEM TO BE SOLVED: To check the quality of droplet discharge with high efficiency. <P>SOLUTION: A droplet discharge device comprises a stage which can hold and move a substrate in an in-horizontal-plane direction, a plurality of nozzles for discharging an insulation material, a discharge head arranged to face the stage, a sensor which detects a landing mark of the insulation material discharged from the nozzle, and a control device which controls the stage, the discharge head, and the sensor. In the droplet discharge device, the stage can move the substrate at least in the uniaxial direction, and the plurality of nozzles of the discharge head are arranged along the direction orthogonal to the uniaxial direction in the horizontal plane, and the sensor is arranged to face the stage to be relatively movable with respect to the stage in the direction orthogonal the uniaxial direction in the horizontal plane. The control device has a function of controlling the stage and the discharge head and discharging the insulation material on the substrate so as to perform drawing and a function of controlling the stage and the sensor and detecting a landing mark of the discharged insulation material, and the control device moves the sensor relatively with respect to the stage in the direction orthogonal to the uniaxial direction in the horizontal plane at the time of detecting the landing mark of the discharged insulation material. <P>COPYRIGHT: (C)2013,JPO&INPIT |
