METHOD AND DEVICE FOR MANUFACTURING ORGANIC EL ELEMENT

摘要

A method for manufacturing an organic EL element, comprising the steps of: interposing a shadow mask having a plate-shaped rotating body that is rotationally driven about a rotation axis, and in which an opening is formed in the rotating body, between a base material in contact with a transportation unit and a nozzle of a vapor deposition source arranged at a position that faces the transportation unit and that is near the base material, in the vicinity of the base material; discharging a vaporized material for forming a constituent layer of an organic EL film from the nozzle while causing the shadow mask to rotate so as to follow the movement of the base material; forming the constituent layer of the organic EL film on the opposite side of the base material relative to the transportation unit.