| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron emission element that can be usable when enlarged, and a manufacturing method thereof. <P>SOLUTION: An electron emission element 1 includes an electrode substrate 2, a particulate layer 3, a thin film electrode 4 and an electric insulation layer 5. The electrode substrate 2 is a structure having conductivity to support the particulate layer 3, the thin film electrode 4, and the electric insulation layer 5. The electric insulation layer 5 is formed on the electrode substrate 2, and has plural opening parts 6. Openings 6A formed by the opening parts 6 are filled with the particulate layer 3 between the electrode substrate 2 and the thin film electrode 4. The particulate layer 3 is constituted by a first particulate layer 31 including an insulative particulate and a conductive particulate, and a second particulate layer 32 including an insulative particulate. The thin film electrode 4 is formed along surface shapes of the particulate layer 3 and the electric insulation layer 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
