A board having layer for preventing humidity and transparency conductive layer

摘要

PURPOSE: A substrate is provided to reduce the degree of moisture movement and the degree of oxygen movement and to form a silicon organic compound and a silicon inorganic compound within a vacuum chamber at the same time. CONSTITUTION: A transparency base material(120) is comprised of a polymer. A moisture movement prevention film(140) is comprised of a silicon organic compound thin film(142) and a silicon inorganic compound thin film(144). The silicon organic compound thin film is formed on one side of the transparency base material through PECVD(plasma-enhanced chemical vapor deposition). The boundary face of a silicon organic compound thin film particle is filled with the silicon organic compounds thin film. A transparent conductive thin film(150) is formed on the exterior of the moisture movement prevention film by a sputtering method.