发明名称 WIRE SAW
摘要 <P>PROBLEM TO BE SOLVED: To accurately and stably detect existence of a break of a wire. <P>SOLUTION: This wire saw 1 cuts a workpiece W by pressing the workpiece W to the traveling wire 3. A nearly parallel wire group 3a is formed between wire guides 2 and 2 driven to rotate. A pair of wire feeding devices 5 and 6 mutually alternately unwind/wind up the wire 3. A liquid supply device 8 supplies a machining auxiliary liquid to the wire group 3a, to which a workpiece holding portion 7 presses the workpiece W. A wire break detecting device 9 having a break detecting member 16 and a vibration sensor 17 is fitted to a support portion 4. When a break of the wire 3 is detected, a control device 10 stops the traveling of the wire 3. The break detecting member 16 and the vibration sensor 17 are fitted to the support portion 4 through a vibration removal member 15. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013035080(A) 申请公布日期 2013.02.21
申请号 JP20110170727 申请日期 2011.08.04
申请人 TOYO ADVANCED TECHNOLOGIES CO LTD 发明人 FUJIMURA KENJI;FUKUMAN MASARU;OYA JUN;TAKAHASHI HIROKAZU
分类号 B24B27/06;B24B49/10;B28D5/04;H01L21/304 主分类号 B24B27/06
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