| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly perform a precise exposure operation. <P>SOLUTION: A shutter device 26 opening/closing a light flux when light is exposed to a workpiece integrally comprises a slide shutter 30 opening/closing the light flux by one slide plate 32 slid by an air cylinder 33, and a rotary shutter 31 opening/closing the light flux by a rotation plate 36 rotated by a servomotor 37. Then, while an exposure time is set on the side of the rotary shutter 31 rotating the rotation plate 36 by the servo motor 37, an exposure timing is set on the side of the slide shutter 30. Thus, an exposure operation can be performed quickly and precisely. Furthermore, a fly eye lens 25 can be blocked from an opened side by the rotation plate 36, so as to make an accumulated light amount on an exposure face 29 from a start of radiation to completion of radiation constant. <P>COPYRIGHT: (C)2013,JPO&INPIT |
