| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas conveyance device capable of efficiently conveying a gas. <P>SOLUTION: The gas conveyance device comprises: a plurality of wire electrodes commonly connected for each period by making the constant number of phases 4 in an arranging order a period; and a periodic pulse power supply which applies four phase pulse voltages V<SB POS="POST">1</SB>to V<SB POS="POST">4</SB>, periodically varying with the lapse of time, to the wire electrodes. The periodic pulse power supply includes drive circuits 431, 432, 433, and 434 for four phases. Each of the drive circuits 431, 432, 433, and 434 comprises: a switching element S<SB POS="POST">1H</SB>whose one end is connected to +V side of a constant-voltage DC power supply circuit 42 and the other end is connected to a wire electrode; a switching element S<SB POS="POST">1L1</SB>whose one end is connected to a GND side of the constant-voltage DC power supply circuit 42 and the other end is connected to a wire electrode via a resistor R<SB POS="POST">1</SB>; and a switching element S<SB POS="POST">1L2</SB>whose one end is connected to a GND side of the constant-voltage DC power supply circuit 42 and the other end is connected to a wire electrode. Each switching element is controlled by a switch control part 41. <P>COPYRIGHT: (C)2013,JPO&INPIT |
