发明名称 THIN FILM TRANSISTOR SUBSTRATE AND METHOD FOR FABRICATING THE SAME
摘要 A thin film transistor substrate includes a substrate, a gate electrode on the substrate, an active layer on or below the gate electrode (the active layer at least partially overlapping the gate electrode) including a first active region and a second active region, the first active region and the second active region facing each other and extending beyond the gate electrode, a source electrode electrically connected to the first active region and a drain electrode electrically connected to the second active region, wherein the active layer includes a recess region which is at least partially recessed from a surface of the active layer facing the gate electrode, and the recess region includes a portion extending between the first active region and the second active region.
申请公布号 US2013043479(A1) 申请公布日期 2013.02.21
申请号 US201113328094 申请日期 2011.12.16
申请人 KIM TAE-JIN;YEO SANG-JAE;CHOI DAE-SUNG 发明人 KIM TAE-JIN;YEO SANG-JAE;CHOI DAE-SUNG
分类号 H01L29/786;H01L21/336;H01L29/04 主分类号 H01L29/786
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