PHYSICAL QUANTITY DETECTING ELEMENT, PHYSICAL QUANTITY DETECTOR AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity detecting element capable of detecting rotation about each axis of an X-axis, a Y-axis and a Z-axis and of exciting vibration by one oscillating circuit.

SOLUTION: A physical quantity detecting element 1 comprises: a base portion 2; a first coupling portion 3a and a second coupling portion 3b that individually extend along an X-axis in directions opposite to each other from the base portion 2; a pair of a first driving vibration arm 4a and a second driving vibration arm 4b and a pair of a third driving vibration arm 4c and a fourth driving vibration arm 4d that individually extend along a Y-axis in directions opposite to one another from the first coupling portion 3a and the second coupling portion 3b; a first driving detection vibration arm 5a and a second driving detection vibration arm 5b that obliquely extend form the first coupling portion 3a; a third driving detection vibration arm 5c and a fourth driving detection vibration arm 5d that obliquely extend form the second coupling portion 3b; and a first detection vibration arm 6a and a second detection vibration arm 6b that individually extend along the Y-axis in directions opposite to each other from the base portion 2.

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