| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for detecting the damage of a light shielding plate, which detect damage of a light shielding plate for blocking a laser beam. <P>SOLUTION: The method for detecting the damage of the light shielding plate is characterized in that, in a light shielding plate 1 in which a laser beam shielding film 5 is pasted at least on the inside face of a glass plate 3 for receiving a laser beam LB, a sensor 17 detecting a scattered laser beam 10 in a damaged part 9 that the light shielding plate has received by the laser beam is provided so as to be confronted with the cut face 14 of the glass plate, and the scattered beam from the damaged part is detected to detect the damage of the light shielding plate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
