ZnO TRANSPARENT CONDUCTIVE FILM FORMING DEVICE AND ZnO TRANSPARENT CONDUCTIVE FILM FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a ZnO transparent conductive film forming device which forms a ZnO transparent conductive film on a substrate at high efficiency.

SOLUTION: The ZnO transparent conductive film forming device (100) comprises: a chamber (110) which is maintained in a vacuum state; a substrate transportation unit (120) which transports the substrate (50) in one direction (A) so as to pass through the inside of the chamber (110), and can stop at an optional point; and a nozzle (130) which is arranged in the chamber (100) so as to be movable in one direction (A) and its reverse direction (B). A gas of DEZn and water vapor are sprayed from the nozzle (130) toward the substrate (50).

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