Sensor arrangement i.e. acceleration sensor arrangement, has cantilevered measuring electrode performing capacitive measurement of deflection of seismic mass relative to electrode, where mass is movable around main extension plane

摘要

The arrangement has a main extension plane (100) provided with a substrate (2) i.e. silicon substrate. Torsion axis of a seismic mass movable around the main extension plane is parallel to the main extension plane. The seismic mass comprises asymmetric mass distribution with respect to the torque axis. A cantilevered measuring electrode (4) performs capacitive measurement of deflection of the seismic mass relative to the measuring electrode. The measuring electrode is fixed at the substrate over a spring element (50).