Acceleration sensor for use with electronic stability program system in automobile sector, has substrate and seismic mass that is deflected against substrate on basis of outer acceleration force along deflection direction

摘要

The acceleration sensor (1) has a substrate (2) and a seismic mass (10) that is deflected against the substrate on the basis of outer acceleration force along a deflection direction (101). The acceleration force is applied on the acceleration sensor. A detection unit (11) is provided for detecting deflection of the seismic mass against the substrate. The detection unit has two electrodes (12,13), where the latter electrode is formed by the acceleration force against the substrate and also against the seismic mass along the deflection direction. An independent claim is included for a method for operating an acceleration sensor.