| 摘要 |
<p>PURPOSE: An apparatus for opening and closing a vacuum chamber is provided to improve a sealing force by vertically or horizontally moving a sealing member using a guide block unit. CONSTITUTION: A chamber is mounted on an opening part of a vacuum chamber. A sealing member(20) opens or closes a gate by moving a shaft(25). A guide block unit(30) horizontally or vertically moves the sealing member and is combined with the shaft. A guide groove guides a movement range of a first roller.</p> |
