SUBSTRATE COATING APPARATUS, SUBSTRATE CONVEYANCE APPARATUS HAVING THE FUNCTION FOR FLOATING THE SURFACE AND THE METHOD OF CONVEYING FLOATING THE SUBSTRATE

摘要

PURPOSE: A floating type substrate coating apparatus is provided to prevent the contamination of a spread liquid, to reduce the loss of a substrate by providing a large amount of substrates at once and to reduce tact time to increase the yield of a substrate. CONSTITUTION: A floating type substrate coating apparatus comprises a stage(100), a guide rail(200), a first conveyance unit(300a), and a second conveyance unit(300b). The stage floats a plurality of substrates by a specific height. A guide rail is arranged in a longitudinal direction of the stage on both sides of the stage. The first and second conveyance unit fixes each of the substrates from each other side and conveys the substrate along the guide rail. The upper part of the stage is separated into a central region and both side regions corresponding to the guide rail. The central region comprises a plurality of outlets and inlets. The both side comprise the inlet.