发明名称 MANUFACTURING METHOD OF CERAMIC TEMPLATE HAVING FINE PATTERN
摘要 <p>Provided is a method for manufacturing a ceramic template having micro patterns. The method for manufacturing the ceramic template comprises the steps of: manufacturing a flexible mold including a protrusion; applying a metal-organic precursor on a substrate to form a coating layer, curing the coating layer in a state where the coating layer is pressed by the flexible mold, and removing the flexible mold to form a metallic oxide pattern having a first concave portion; filling a polymer block coating layer formed of a polymer block constituted by at least two repeated units into the first concave portion; sintering the polymer block coating layer to finely phase-separate the repeated units from each other, thereby forming a self-assembled structure constituted by a plurality of polymer blocks; and removing a portion of the plurality of polymer blocks to form a micro pattern having a second concave portion.</p>
申请公布号 KR101235360(B1) 申请公布日期 2013.02.20
申请号 KR20100130785 申请日期 2010.12.20
申请人 发明人
分类号 B32B3/30 主分类号 B32B3/30
代理机构 代理人
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