An electrostatically coupled pressure sensor

摘要

A disclosed pressure-responsive sensor 80 includes a flexible element 82 contained within an enclosure and a membrane 96 configured to exert an electrostatic force on the flexible element to cause the flexible element to respond to pressure variations on the membrane. A disclosed pressure-sensing method includes electrostatically coupling a membrane to a flexible element contained within an enclosure to transfer a pressure response of the membrane to the flexible element. Motion of the flexible element is converted into an electrical signal. The sensor may be a micro electro mechanical systems (MEMS) sensor suitable for underwater use as a hydrophone for acoustic sensing in marine seismic surveying.