| 摘要 |
<p>PURPOSE: A fluid control apparatus is provided to selectively input and output two kinds of fluid by including two valves which are symmetrically arranged and have the same shape. CONSTITUTION: Six rectangular parallelepiped path blocks(4-9) support valves(2,3). A connection member(10) is attached to a chamber and is arranged under the six rectangular parallelepiped path blocks. The valve is composed of a body(21,23) and an actuator(22,24) to open and close a fluid path. The body includes a first fluid inlet path(21a,23a), a second fluid inlet path(21b,23b), and an outlet path(21c,23c).</p> |
