| 摘要 |
PURPOSE: Tensile strained semiconductor photon emission and detection devices and an integrated photonics system are provided to form a germanium region which touches stressor regions for tensile strain. CONSTITUTION: An embedded stressor(12,14) is formed at both sides of a germanium region(16). The embedded stressor induces the tensile strain of the volume of germanium between SiGe stressor regions. The narrow strip of tensile strained germanium is used as a light emission active region of laser or a diode. An optical element defines an optical path. |
