METHOD AND APPARATUS FOR DETERMINING COWORK OF GANTRY USING FIDUCIAL MARK OF SUBSTRATE

摘要

PURPOSE: A method and an apparatus for determining the cowork of a gantry using a fiducial mark of a substrate are provided to prevent the interference between gantries. CONSTITUTION: An entire region mark central point is calculated based on the whole fiducial mark included in a substrate(S210). The fiducial mark of the substrate is classified into two groups based on the entire region mark central point(S220). Using the fiducial mark included in each group, the mark central point of each group is calculated(S230). The separation distance between the mark central points of each group is calculated(S240). It is determined whether the cowork of a dual gantry is performed or not by comparing the separation distance with a reference distance(S250). [Reference numerals] (AA) Start; (BB) End; (S210) Calculating an entire region mark central point by using a fiducial mark of a substrate; (S220) Classifying the fiducial mark of the substrate into two groups based on the entire region mark central point; (S230) Calculating the mark central point of each group by using the fiducial mark included in each group; (S240) Calculating the separation distance between the mark central points of each group; (S250) Determining whether the cooperative work of a dual gantry is performed or not by comparing the separation distance with a reference distance