| 摘要 |
FIELD: process engineering.SUBSTANCE: invention relates to high-precision instruments, particularly, to micromanipulator drives and may be used for notable displacement of objects with high-precision positioning and application of notable forces. Proposed device comprises two communicating different-cross-section vessels, filled with fluid and tightly closed by moving pistons, and drive to develop force at one of said pistons. At least, one of said vessels is equipped with means to vary its underside volume composed of bellows displacing there inside or small-diameter membrane made in its wall of in piston. Drives creating forces at one of said pistons or displacing membranes and bellows are composed of magnetostrictive element or piezoelement.EFFECT: higher positioning precision.7 cl, 1 dwg |
