| 摘要 |
<p>PURPOSE: A charged particle beam drawing apparatus and a method for manufacturing an article are provided to reduce discharge by suppressing pressure rise between electrode plates due to gas discharged from resisters. CONSTITUTION: An interval between electrode plates(3) is maintained by a spacer(6) arranged in a boundary between four blocks. A first region(2) including a first opening to pass a plurality of electron beams is formed in the center of each block. A second opening(8) is formed in a second region(4) of the electrode plate to surround the first region and is different from the first opening. The second opening maintains the structural strength of the electrode plate and maximally includes three electrode plates.</p> |
