| 摘要 |
PURPOSE: An apparatus for attaching and detaching a substrate holder is provided to improve the quality of a device by preventing damage to a substrate since being smoothly operated without scratches on a substrate attaching/detaching member or a substrate holder in the attaching/detaching manipulation of the substrate. CONSTITUTION: An upper plate(100) and a lower plate(200) constitute a substrate holder. A first exhaust duct(110) is formed inside the upper plate. A second exhaust duct(215) connected to a mounting hole is formed on the lower plate. The mounting hole is arranged on the first exhaust duct at a certain interval. A substrate attaching/detaching member(400) combines a substrate(300) with a substrate holder. |
