| 摘要 |
<p>PURPOSE: A noncontact moving device is provided to prevent the shape variation and shaking of substrates or objects by arranging first and second air holes. CONSTITUTION: A noncontact moving device comprises an upper plate(100), multiple first air holes(110), multiple second air holes(120), an air chamber(220), multiple opening parts(130), first insert nozzles(140), second insert nozzles(150), a first air guide part, a second air guide part, and a lower plate(200). The first and second air holes are positioned on the upside of the upper plate to eject air. The air chamber is positioned on the underside of the upper plate. The opening parts are positioned in the air chamber and are connected to the first and second air holes. The first and second insert nozzles are positioned in the opening parts. The first air guide parts are formed between the spiral grooves of the first insert nozzles and the interior of the opening parts. The second air guide parts are formed between the spiral grooves of the second insert nozzles and the interior of the opening parts.</p> |
