| 摘要 |
Provided is a zinc oxide sintered compact tablet enabling a transparent conductive film having no pinholes defects to be stably obtained during vacuum deposition film formation by suppressing the occurrence of the splashing phenomenon. A zinc oxide sintered compact tablet having hexagonal crystal structure, wherein when the integrated intensity of surface (103) and surface (110) found through X-ray diffraction analysis using CuK± radiation is taken to be I (103) and I (110) respectively, the orientation of the uniaxially pressed surface that is expressed by I (103) /(I (103) + I (110) ) is 0.48 or more is obtained by performing pressurized formation of a granulated powder composed of a zinc oxide powder or a powder mixture of zinc oxide and an added element as a dopant and having a percentage of donut shaped secondary particles of 50 % or more, sintering at normal pressure and a temperature of 800 °C to 1300 °C, and further performing reduction treatment by maintaining the normal pressure sintered compact in a vacuum at a pressure of 1 x 10 -3 Pa or more and at a temperature of 800 °C to 1300 °C for no less than 1 minute and no longer than 10 minutes. |
